Custom Quartz Rings

Precision quartz rings machined to OD, ID, flatness, and parallelism — built around whatever hole, groove, or step your equipment interface needs.

OD, ID, thickness, and any groove or hole feature are coupled — a feature cut close to the ID or OD affects flatness and remaining wall around it. Send the full feature layout, not the ring outline alone.

Precision Quartz Rings for Semiconductor, Vacuum and Thermal Equipment

Rings are used as spacers, retainers, mounting collars, and sealing surfaces across semiconductor, vacuum, and thermal equipment. Plain (no features), stepped (a shoulder or lip machined in), grooved (for an O-ring or retaining feature), and drilled (mounting or process holes) configurations are all made from the same OD/ID/thickness starting point.

Ring OD, ID, Thickness, Flatness and Parallelism

Flatness and parallelism are checked per face — a ring can be flat on each face individually and still have the two faces out of parallel, which matters wherever the ring seats against another part or seals a joint. Concentricity between ID and OD matters most where the ring centers a shaft, tube, or another component through its bore.

Grooves, holes, and steps are added by CNC grinding or mechanical/diamond drilling (down to about Ø0.8 mm at ±0.02 mm); tell us feature position relative to ID or OD so the whole cross-section can be checked in one measurement. Before shipment we check OD, ID, thickness, flatness, parallelism, concentricity, and feature dimensions.

ID × OD × TQuote Dimensions

±0.1 mmSize Reference

FlatnessFace Control

ParallelismStack Control

JGS2Material Option

Low OHMaterial Option

Annular Geometry

ID, OD and Face Thickness Must Share the Same Datum System

Controlled Feature	Reference Capability / Requirement
ID × OD × Thickness	All three finished dimensions stated together
Dimensional Tolerance	±0.1 mm industry-reference level; tighter critical features quoted by geometry
Flatness	Applied to functional seating faces
Parallelism	Controls axial stack-up between the two faces
Concentricity	ID referenced to OD where radial fit matters
Edge	Chamfer, radius or fire-polished edge by function
Secondary Features	Steps, grooves, holes or slots dimensioned from the seating face
Material	JGS2-class or low-OH quartz according to equipment use

Ring Configuration

Separate Seating Faces from Non-Critical Edges

Form	Controlled Features	Use
Plain ring	ID, OD, thickness and faces	Spacer or isolation ring
Stepped ring	Two diameters and shoulder height	Located equipment interface
Grooved ring	Groove width, depth and radius	Seal or retaining feature
Drilled ring	Hole count, diameter and PCD	Mounted or indexed component

Available Forms

Configurations Defined by the Process

Plain RingSimple annular spacer with controlled faces

Stepped RingShoulder or counterbore for radial location

Grooved RingSeal, retaining or flow groove by drawing

Drilled RingBolt or alignment holes located from a defined PCD

Applications

Sealing, Spacing and Equipment Isolation

Semiconductor EquipmentLow-OH quartz rings for process assemblies

Vacuum HardwareRigid annular seating and isolation components

Thermal EquipmentQuartz spacers around high-temperature zones

Custom FixturesStepped or drilled rings matched to mating parts

Product Examples

Product Forms and Finished Components

Need a precision quartz ring?Send ID, OD, thickness, critical faces, concentricity, chamfers and every groove or hole dimension.

Open the Product Configurator

Engineering Data

Grade-Qualified Material Purity

Electric-fused / flame-fused quartz: SiO₂ ≥99.99%; synthetic JGS1-grade fused silica: ≥99.999%. Grade and lot certificate govern supplied material.