Semiconductor Handling

Quartz handling and process components support semiconductor and photovoltaic production where heat resistance, cleanliness and repeatable geometry are required. Select the product family below and provide wafer size, capacity, interfaces and process conditions.
Semiconductor Handling Products
Quartzware for Wafer and Process Handling
Boats, carriers, baskets, tanks and process components are reviewed as functional assemblies. Slot geometry, wafer spacing, support points, interfaces and handling clearances must be coordinated with the process equipment.
Information for Manufacturing Review
Provide wafer or substrate size, loading capacity, slot or support layout, overall envelope, mating features, cleaning and process environment, operating temperature, quantity and inspection requirements.
Typical Applications
Products support diffusion and oxidation, wafer cleaning, wet processing, thermal treatment, photovoltaic handling, laboratory development and custom semiconductor equipment.
Additional Process Quartz Components
CVD and diffusion process tubes, insulation cylinders, gas-protection and liner tubes, quartz bottles for heated pure water or acid service, quartz rings and plates, machined covers, furnace doors, grooves, threads, and RTP / RTO / EPI components are specified by equipment drawing. Process tubes · 8–36 in arc-fused crucibles · Cleaning tanks · Quartz bottles. High-temperature process applications require grade and thermal-cycle qualification.
FAQ
Provide dimensions, material, tolerances, processing, quantity and application conditions.
Yes. Cutting, grinding, drilling, polishing, hot forming and welding can be reviewed against the requested geometry.
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