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Custom Quartz Sputtering Targets

ParameterTypical Range
Target size (diameter or L×W)25–300 mm
Thickness3–10 mm
Flatness≤0.05 mm over target diameter
Surface roughnessRa < 1 µm as-ground; finer on request
Material composition / purityConfirmed per application, sent with your quote
DensityConfirmed per application
Backing / bondingAvailable — confirm current capability before assuming it's included
Inquiry

Quartz sputtering targets machined to size, thickness, and flatness for PVD and thin-film work — where material purity and surface condition determine deposition quality, not just target dimensions.

Material purity and mechanical spec (thickness, flatness, surface finish) both affect target performance and are confirmed together — a correctly-sized target with unconfirmed purity isn't a complete spec for a sputtering application.

Purity, Density, Surface Finish and Backing Requirements

Purity and density directly affect film quality and deposition consistency; these are confirmed against a real material certificate for your order rather than published as a generic number here, since they depend on the specific quartz stock used. Surface finish on the sputtering face affects initial burn-in behavior — a rougher surface takes longer to reach stable sputtering conditions than a well-ground one.

Quartz Sputtering Targets Functional Standard & Manufacturing Limit

Backing (bonding the target to a metal support plate for better thermal and mechanical stability during sputtering) is available where our current bonding capability supports your target size and material — confirm before assuming it's included. Target size range, thickness tolerance, and flatness in the table above represent standard capability; larger or thinner targets may need confirmation before we commit to a schedule.

Material and Bonding Requirements

Tell us your deposition process (magnetron sputtering, RF, etc.) and target application, since that affects whether bonding is needed and what thickness makes sense — a thin target may need backing for handling and thermal stability that a thick target doesn't. Fabrication is precision blank preparation, cutting, grinding, and polishing to final flatness and surface finish, with cleaning before packaging. Before shipment we check dimensions, thickness, flatness, surface condition, and — where available — purity/density documentation.

≥99.99%Natural SiO₂ · synthetic ≥99.999%
50.8 mm2-Inch Diameter
76.2 mm3-Inch Diameter
101.6 mm4-Inch Diameter
152.4 mm6-Inch Diameter
±0.1 mmSize Reference
Target Definition

Material Form, Purity and Backing Scope Must Be Explicit

Controlled FeatureReference Capability / Requirement
Target MaterialFused SiO₂ target material; material form and certificate scope stated in the quotation
PurityElectric-fused / flame-fused quartz: SiO₂ ≥99.99%; synthetic JGS1-grade fused silica: ≥99.999%. Grade and lot certificate govern supplied material.
ShapeRound, rectangular or custom outline matched to the sputtering source
Diameter / Length × WidthFinished target size defined from the cathode drawing
ThicknessSpecified with erosion allowance and backing arrangement
Flatness / ParallelismControlled at the target-to-backing interface
Surface ConditionGround or polished finish defined for the active face and bonding face
Backing / BondingIndium bonding and oxygen-free copper backing stated only when included in the confirmed supply scope
Common Diameters

Metric Equivalents for Standard Cathode Sizes

Nominal Source SizeTarget DiameterQuote Requirement
2 inchØ50.8 mmThickness, surface finish and backing scope
3 inchØ76.2 mmThickness, surface finish and backing scope
4 inchØ101.6 mmThickness, surface finish and backing scope
5 inchØ127.0 mmThickness, surface finish and backing scope
6 inchØ152.4 mmThickness, surface finish and backing scope
Available Forms

Target Supply Formats

Round TargetCircular SiO₂ target matched to a standard or custom cathode
Rectangular TargetLength, width and thickness defined by the source and erosion track
Backed AssemblyBacking material and bonding method included only after scope confirmation
Unbonded Target BlankFinished target supplied without a backing plate for customer integration
Applications

Thin-Film Deposition

Optical CoatingsSiO₂ source material for dielectric and protective optical-film processes
Semiconductor ResearchTarget formats for development-scale PVD and magnetron sputtering systems
Functional & Decorative FilmsCustom target outlines matched to the installed sputtering cathode
Need a SiO₂ target matched to a specific sputtering source?Send target material, purity requirement, cathode model, diameter or outline, thickness, surface condition and backing scope.
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Technical Drawing

Drawing redraws live · blue hatched area = cut section · all dimensions in mm
Parameters

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Common Options
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