Custom Quartz Wafer Boats

Parameter	Typical Range
Wafer size	100 mm (4″), 150 mm (6″), 200 mm (8″) — other sizes on request
Slot count	25, 50, 100, or 150 (standard batch sizes)
Slot pitch	4–10 mm, depending on boat capacity
Slot width	Wafer thickness + clearance, typically 1–2 mm
Boat length	300–600 mm
Support geometry	V-groove or flat-bottom slots

Inquiry

Quartz wafer boats built to your wafer size, slot count, and furnace geometry — sized to fit the equipment, not just a generic slotted rack.

Wafer size, slot pitch, and boat length are one coupled set — a fixed slot pitch times slot count sets the boat length, so you can't specify all three independently. Confirm which two are fixed by your equipment and let the third follow.

Quartz Wafer Boats for Diffusion, Oxidation and Thermal Processing

A wafer boat holds wafers vertically, evenly spaced, for horizontal or vertical furnace processing — diffusion, oxidation, or annealing. The boat itself doesn't do the processing; its job is to hold wafers at a consistent pitch and orientation so the process is uniform across the batch.

Wafer Boat Configurations by Wafer Size and Capacity

Slot count and pitch are set together — more slots at a fixed boat length means tighter pitch, which limits wafer thickness and handling clearance. Standard batch sizes (25/50/100/150) are common starting points; non-standard counts are available but confirmed against your furnace's usable length.

Slot Width, Slot Pitch and Wafer Support Geometry

Slot width is sized to your wafer thickness plus enough clearance to load and unload without contact damage — too tight and wafers bind, too loose and they shift during processing. Support geometry (V-groove vs. flat-bottom) affects contact area and particle generation; V-groove is more common for edge-only contact.

Choosing a Boat Layout for Existing Furnace Equipment

If you're replacing an existing boat, send the equipment model and, if you have it, the old boat or its drawing — boat length, slot pitch, and end-structure geometry all need to match the furnace's usable zone and loading mechanism, not just the wafer size.

Slot Machining, Quartz Welding and Boat Assembly

Boats are built from rod or plate stock, slot features machined in, and the frame assembled by quartz welding. Before shipment we check slot width, pitch, slot-to-slot consistency, overall length, support straightness, and weld points.

4 / 6 / 8 / 12 inWafer Formats

25 / 50Reference Slot Counts

2.54 mmFine Pitch

4.76 mmProcess Pitch

10 mmWide Pitch

±0.1 mmPitch Reference

Wafer Loading Geometry

Wafer Diameter, Slot Width and Pitch Must Be Defined Together

Controlled Feature	Reference Capability / Requirement
Supported Wafer	4, 6, 8 or 12 inch format; custom substrate outlines by drawing
Slot Count	Capacity matched to furnace tube length and loading method
Slot Width	Specified from wafer thickness and required clearance
Slot Pitch	2.54, 4.76 or 10 mm industry-reference series
Pitch Tolerance	±0.1 mm quotation reference, confirmed against boat length and slot count
Support Geometry	Contact points, rail spacing and wafer insertion direction
Boat Length / Height	Matched to furnace hot zone and transfer tooling
Material / Packaging	Low-OH semiconductor-grade quartz option with clean packaging scope specified

Reference Layouts

Start from Wafer Size and Required Capacity

Wafer Format	Reference Capacity	Pitch / Drawing Input
4 inch	25 slots	Select pitch and rail spacing
6 inch	50 slots	Confirm furnace and loading envelope
8 inch	By drawing	Define support contact and transfer interface
12 inch	By drawing	Define load, handling and furnace clearances

Available Forms

Configurations Defined by the Process

Twin-Rail BoatOpen rail geometry with machined wafer slots

Cage BoatCross-supported frame for larger wafer formats

Covered BoatProtective cover or shield incorporated by drawing

Handled BoatLoading ears or transfer features matched to tooling

Applications

Semiconductor Thermal Processing

Diffusion & OxidationControlled wafer spacing inside horizontal or vertical furnace equipment

AnnealingQuartz support geometry for repeated high-temperature loading cycles

LPCVDLow-OH process quartzware matched to tube and loading dimensions

Equipment ReplacementBoat reproduced from a datum drawing or measured sample

Need a wafer boat matched to an existing furnace?Send wafer size, slot count, pitch, slot width, boat envelope, support geometry and loading interface.

Open the Product Configurator

Engineering Data

Grade-Qualified Material Purity

Electric-fused / flame-fused quartz: SiO₂ ≥99.99%; synthetic JGS1-grade fused silica: ≥99.999%. Grade and lot certificate govern supplied material.

Holder compatibility with 4–12 in customer wafers describes the fixture envelope. It is separate from the quartz-wafer product line, whose standard manufactured wafer series is 25.4–150 mm (1–6 in). State wafer diameter, slot pitch and loading orientation on the fixture drawing.