Quartz Glass Applications
Quartz Glass for Semiconductor Processing
High-purity fused quartz is a core material in semiconductor processing because it tolerates high temperature, offers low thermal expansion and can be fabricated into clean process hardware. We manufacture complete quartz assemblies for thermal treatment, wafer handling and wet processing.
Furnace and Diffusion Processing
Quartz furnace and diffusion tubes form the controlled process environment for oxidation, diffusion, annealing and related high-temperature steps. Overall length, heated length, flange geometry, ports and end design are treated as one assembly.
- Horizontal and vertical furnace tubes
- Gas inlet and exhaust ports
- Custom flanges and closed-end designs
Wafer Handling
Quartz boats, carriers and holders support wafers through high-temperature processes while minimizing contamination. Slot pitch, wafer size, support geometry and robot or operator interfaces are made to the equipment layout.
- Wafer boats
- Carriers and holders
- Custom supports and handling fixtures
Wet Processing and Cleaning
Quartz tanks, baskets and cleaning assemblies provide chemical resistance and high cleanliness for selected wet processes. Capacity, drain and overflow features, handling geometry and compatibility with the actual chemistry are confirmed before production.
- Cleaning tanks
- Wafer baskets
- Rinse and process assemblies
Process Chambers and Custom Parts
Bell jars, covers, windows and machined quartz components can be integrated into deposition, etch, inspection and research equipment. Send a drawing or worn sample so sealing faces, ports and critical interfaces can be reviewed together.
