Custom Machined Quartz Plates

Quartz plates with holes, pockets, slots, counterbores, or stepped features machined to a drawing — built around what can actually be cut and verified, not just cut to outline.

Feature size, depth, and spacing aren't independent of the plate's overall geometry — a pocket or slot cut too close to the edge or to another feature affects flatness and remaining wall thickness around it. Send the full feature layout, not one feature in isolation.

Holes, Pockets, Slots, Counterbores and Stepped Features

Holes are drilled mechanically or with diamond tooling down to about Ø0.8 mm at ±0.02 mm; laser drilling reaches much finer openings, down to about 1 µm, though the depth and thickness it applies to needs confirming per part. Pockets, slots, and counterbores are CNC-ground rather than drilled — each one removes material from one face and affects flatness and internal stress on that side, more so as the feature gets deeper relative to plate thickness.

Machined Quartz Plates Factory Standard & Manufacturing Limit

The table above is what's repeatable without added lead time. Minimum feature size and tightest position tolerance aren't both available at the smallest scale at once — the finer a hole or slot needs to be, the more that constrains achievable position tolerance around it. Flag your priority (feature size vs. position accuracy) on the RFQ.

Feature Tolerances, Flatness and Surface Requirements

Flatness is checked after machining, not just on the starting blank — deep pockets or slots relieve internal stress unevenly and can pull a plate slightly out of flat, which is why the manufacturing limit for flatness depends on how much material a given feature layout removes. Before shipment we check reference dimensions, hole diameter and position, slot/pocket width and depth, step height, flatness, edge condition, and surface finish.

±0.02 mmReference CNC Tolerance

Ø0.8 mmReference CNC Hole

Ø0.1 mmReference Laser Hole

≥0.3 mmReference Slot Width

3DCurves & Pockets

ThreadedCustom Interfaces

Machined Geometry

Dimension the Features from Functional Datums

Controlled Feature	Industry-Reference Capability / Requirement
Plate Size / Thickness	Finished envelope with flatness required after machining
CNC Tolerance	Reference ±0.02 mm on supported features
Minimum CNC Hole	Reference Ø0.8 mm
Laser Hole	Reference down to Ø0.1 mm for suitable thickness and geometry
Slot / Groove	Reference width ≥0.3 mm
Position	Hole, slot and pocket location from one datum system
Internal Radius	Tool radius shown at pocket and slot corners
Surface	Ground, polished or localized functional finish after machining
Edges	Chamfer, bevel or radius identified where chipping and handling matter

Process Selection

Use CNC, Laser and Polishing for Different Features

Process	Best Suited To	Design Input
CNC grinding / machining	Profiles, pockets, counterbores, steps and threads	Tool access and internal radii
Laser processing	Fine holes and localized narrow features	Thickness, taper and heat-affected-zone acceptance
Grinding / lapping	Thickness, flatness and controlled support faces	Functional datum face
Polishing	Optical or sealing faces after feature machining	Surface quality and edge exclusion

Machined Features

Quartz Plates with Integrated Equipment Geometry

Holes & PocketsPositioned features for fasteners, flow and component seating

Slots & GroovesStraight or profiled channels with width, depth and radius controlled

Counterbores & PatternsStepped holes and PCD layouts tied to assembly datums

Threads & 3D ProfilesCustom interfaces and curved surfaces reviewed from the complete drawing

Applications

Machined Plates as Finished Equipment Parts

Semiconductor FixturesLow-contamination plates with holes, pockets and alignment features

Equipment PanelsCustom quartz interfaces for thermal, chemical and vacuum systems

Heater & Sensor MountsSlots, bores and supports integrated into a heat-resistant plate

Optical AssembliesPrecision plates that combine mounting geometry with polished working faces

Product Examples

Product Forms and Finished Components

Need a machined plate reviewed feature by feature?Send the CAD drawing, datums, critical tolerances, material, flatness and surface requirements.

Open the Plate Configurator

Engineering Data

Grade-Qualified Material Purity

Electric-fused / flame-fused quartz: SiO₂ ≥99.99%; synthetic JGS1-grade fused silica: ≥99.999%. Grade and lot certificate govern supplied material.